类别 Category |
组成及含量 Component&Mixing Range |
用途 Purpose |
氦气 |
(0.5%-10%)He+N2(Air) |
用于热导仪和质谱仪的检漏 |
卤碳素 |
(0.5%-2%)卤碳素+N2(Air) |
用于电子捕获仪、热导色谱仪和氢火焰色谱仪的检漏 |
六氟化硫 |
(0.005%-10%)SF6+N2(Air) |
用于热导和电子捕获仪的检漏 |
氪-85 |
(0.5%-2%)85Kr+N2 |
用于放射性仪器的检漏 |